LithoBench-PDE: A PDE-Based Benchmark Dataset for Computational Lithography Simulation

LithoBench-PDE is a benchmark dataset for PDE-based computational lithography simulation. It provides high-fidelity 3D reference simulations for photomasks from the LithoBench dataset, with intermediate 2D and 3D field data from the lithography simulation pipeline. The samples form ground-truth input-output pairs for three PDE learning tasks associated with the governing PDEs of photolithography.